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Recirculating Cooler for industrial applications (basic model, additional options for specific requirements available).

The SemiChill series offers powerful recirculating coolers. These units have been especially designed for applications in the semiconductor industry. Five models are available, with cooling capacities from 2.5 to 10 kW (air- or water-cooled). Working temperature ranges from +5 to +35 °C which can optionally be extended from -20 to +130 °C. Also available is a selection of powerful pumps. The units can be modified to provide heater capacities up to 5 kW. Selection between different electronic modules to conform to simple or high demands such as, for example flow rate and conductivity measurement, external temperature control or integration of the coolers via analogue signals, RS232, devicenet or ethernet. A large range of accessories and options including DI filters, microfilters, USB adapters, etc. is available.


Your advantages

  • For the most demanding applications
  • Space-saving, no lateral ventilation
  • Handles and castor make relocation easy
  • Industrial grade mains power switch and emergency cut-off
  • Pressure gauge
  • Liquid level indicator
  • Front filling port
  • Low noise level
  • PID temperature control
  • ATC3 3-point calibration
  • Early warning system for low liquid level
  • Warning and safety functions
  • Modular design allows selection between different options
  • Water cooled model


Technical Data


Order No. 9500026XXP3H0
Model series SemiChill
Category Recirculating Coolers
Working temperature range (°C) +5 ... 35 Standard
-20 ... 80 Option
Temperature stability (°C) ± 0.1
Setting / display resolution 0.1 °C
Integrated programmer 1x10 steps
Temperature display LED Option
Heating capacity (kW) 0 Standard
1 Option
Cooling capacity (Medium Ethanol)
20 °C 2.5 kW
0 °C 1.5 kW
-10 °C 0.9 kW
Pump capacity flow rate (l/min) 33
Pump capacity flow pressure (bar) Option
Bath opening / bath depth (W x L / D cm) Ø = 7 / - cm
Pump connection NPT 3/4"
Barbed fittings diameter (inner dia. / mm) 3/4"
Filling volume (liters) 21 ... 33
Refrigerant R404A
External Pt100 sensor connection Integrated
Digital interfaces RS232
Optional Profibus
Ambient temperature 5 ... 40 °C
Dimensions W x L x H (cm) 49 x 62 x 105
Weight (kg) 123
Classification according to DIN12876-1 Classification III (FL) according to DIN 12876-1
Cooling of compressor Water



Easy to read
Large LED temperature display for actual value and setpoint (resolution 0.01 °C)
A perfect view
Ample, easy to read VFD Comfort display for simultaneous display of 3 values, warning functions, high temperature cut-off, pump stages (resolution 0.01 °C)
Pump stage and liquid level
Backlit indicator for selected pump stages and filling volume on Presto® PLUS, Magnum 91 & Forte HT
Time saving
Comfortable and simple operation for setpoint adjustment
PID Temperature control with drift compensation and adjustable control parameters, temperature stability ±0.02...±0.2 °C)
High measuring accuracy
Absolute TemperatureCalibration’ for manual compensation of a temperature difference, 1-point calibration
Clever pump system
Reliable and consistent pump capacity, electronically adjustable pump stages
Control from the external application
External Pt100 sensor connection for precise measurement and control directly in the external application
Serial connection
RS232 interface for PC connection, e.g. for data communication and recording of measured values
Easy program control
Integrated programmer for the execution of time and temperature dependant profiles, 1 temperature profile with 10 steps max., with real time clock
Automatic control of operating time
Electronic countdown-timer function for timer-programmed unit shut-down, standby mode after programmed time expires
Early warning system for low liquid level
Maximum safety for applications, optical and audible alarm, allows user to refill bath fluid before the unit shuts down
Early warning system for high/low temperature limits
Maximum safety for applications, optical and audible alarm, convertible to automated cut-off function
Enhanced protective functions 
Maximum safety, adjustable high temperature cut-off or dry-running protection, additional display of setpoints permits easy and precise adjustments
For flammable bath fluids
Classification III (FL) according to DIN 12876-1
Consistent cooling capacity 
Easily removable venting grid for quick and easy cleaning.
100 % Cooling capacity
‘Active Cooling Control’ for cooling available throughout the entire working temperature range, fast cool-down even at higher temperatures


Other characteristics


Important information: this data sheet contains only the basic model. Select your individual SemiChiller according to your specific requirements and the available options. Please contact us: we help you to configure a suitable model for your requirements.



Technical changes without prior notification. Images may deviate from the original.